
Surface Tension Gradient Drying (STG)
Often called Marangoni drying or IPA vapor drying — yields substrates that are watermark-free with low particle counts and no feature damage.

VORTEX 2000 Automated Intelligent Process System™
The MicroTech Vortex 2000 IPS™ moves wafer cassettes in any number of preprogrammed destinations incorporating both linear and rotational robotics.

Tube Wash: Vertical & Horizontal
Acid cleaning system for quartz tubes; reduces chemical, water & effluent usage. Conformal etching, recirculation, concentration monitoring.

Cleaning & Surface Prep
Over 25 years experience in these processes: RCA, SC 1, SC 2, HF last, Marangoni drying…and more. White papers on solvent and semi-aqueous chemistry applications.













